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Trimethylsilyl dihydrogen phosphate

CAS 7422-66-4

Silanol, 1,1,1-trimethyl-, 1-(dihydrogen phosphate)

EPA and Census publish no US supply data for this chemical.

Molecular structure of 7422-66-4
US productionNot reported
Top sourceNo public record

This chemical is listed as active in US commerce, but no company reported it to EPA’s survey for 2019 or 2023. Sites may have made or imported less than the threshold amount, or none.

Why supply is unknown

Where It Comes From

EPA and Census publish no US supply data for this chemical.

Why It Matters

No EPA sector or FDA product records name a use for this chemical.

Chemical Identity

CAS7422-66-4
PubChem CIDNot recorded
DTXSIDDTXSID10558683
FormulaC3H11O4PSi
Mol. Weight170.176 g/mol
SMILESC[Si](C)(C)OP(O)(O)=O

Data Sources

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Brief citations

Trimethylsilyl dihydrogen phosphate (CAS 7422-66-4) https://chemicalindependence.com/chemical/7422-66-4/ EPA TSCA Inventory: CAS 7422-66-4. Retrieved 2026-10-04. https://www.epa.gov/tsca-inventory