Chlorosilane

CAS 13465-78-6

U.S. production volumes are classified as confidential business information.

US productionCBI

Confidential Business Information. The EPA withholds this volume because publishing it could reveal the reporting company's trade secrets.

Top sourceNo public record

At least one company claimed its 2023 production or import volume for this chemical as confidential, so EPA withholds it.

Why supply is unknown

Production is reported production, not a complete census of factories. US production volume is confidential. Production reporting year: 2023.

Where It Comes From

EPA reports by year

2023: US production Confidential · Imports Confidential
2019: US production Confidential · Imports Confidential

EPA-registered manufacturers (1)

Companies that report making or importing this chemical to the EPA. Registration is US-centric and does not indicate import origin.

Rec Silicon

Why It Matters

Sectors

Electronics

Downstream UsesNot recorded

FDA Shortage Status

Whether any manufacturer currently reports this drug as in shortage on the FDA Drug Shortages database. "Active Shortage" means at least one presentation has status "current."

No FDA shortage records

Industrial Uses

•Semiconductor and photovoltaic agent in Computer and Electronic Product Manufacturing (100%)Processing—incorporation into article

Chemical Identity

CAS13465-78-6

PubChem CID61622

DTXSIDDTXSID90884614

FormulaClH3Si

Mol. Weight66.56 g/mol

SMILES[SiH3]Cl

Data Sources

EPA CompTox (DSSTox) · DTXSID90884614Retrieved 2026-04-06
PubChem · compound 61622Retrieved 2026-04-06
EPA Chemical Data ReportingReporting year: 2023 · Retrieved 2026-10-04
EPA Chemical Data ReportingReporting year: 2023 · Retrieved 2026-10-04

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Brief citations

Chlorosilane (CAS 13465-78-6) https://chemicalindependence.com/chemical/13465-78-6/ EPA CompTox (DSSTox): DTXSID90884614. Retrieved 2026-04-06. https://comptox.epa.gov/dashboard/chemical/details/DTXSID90884614 PubChem: 61622. Retrieved 2026-04-06. https://pubchem.ncbi.nlm.nih.gov/compound/61622 EPA Chemical Data Reporting: 13465-78-6. Reporting year: 2023. https://www.epa.gov/chemical-data-reporting EPA Chemical Data Reporting: CAS 13465-78-6. Reporting year: 2023. https://www.epa.gov/chemical-data-reporting