Chlorosilane

U.S. production volumes are classified as confidential business information.

Molecular structure of 13465-78-6
US ProductionCBI

The EPA did not publish how much of this chemical companies made or imported, or marked that amount confidential. Without that volume, ACID cannot calculate import dependency.

Where It Comes From

EPA-registered manufacturers (4)
Merck Kgaa · DE Germany
Hemlock Semiconductor Operations
Rec Silicon
Versum Materials

Why It Matters

Sectors
ElectronicsCore Chemicals
Downstream UsesNo data available
FDA Shortage Status
No FDA shortage records

Industrial Uses

Used in 3 sectors as 2 functional roles.

  • Intermediate in All Other Basic Inorganic Chemical Manufacturing (100%)Processing as a reactant
  • Semiconductor and photovoltaic agent in Computer and Electronic Product Manufacturing (5%)Processing—incorporation into article
  • Semiconductor and photovoltaic agent in All Other Basic Organic Chemical Manufacturing (95%)Processing as a reactant

Chemical Identity

CAS13465-78-6
PubChem CID61622
DTXSIDDTXSID90884614
FormulaClH3Si
Mol. Weight66.56 g/mol
SMILES[SiH3]Cl

Data Sources

DTXSID908846142026-04-06

https://doi.org/10.23645/epacomptox.5588566

Archive: data/sources/comptox/dsstox_identifiers.csv

616222026-04-06

https://pubchem.ncbi.nlm.nih.gov/rest/pug/compound/cid/61622/property/MolecularFormula,MolecularWeight,CanonicalSMILES,InChIKey/JSON

Archive: data/sources/pubchem_properties/61622.json

13465-78-62026-04-24

https://www.epa.gov/chemical-data-reporting

Archive: data/sources/epa_cdr/2020_cdr.csv

CAS 13465-78-62026-04-25

https://www.epa.gov/chemical-data-reporting

Archive: data/sources/epa_cdr/2020_cdr_industrial.csv